CPS offers original equipment upgrades for the Concept One, GaSonics and Speedfam/IPEC product lines. Our Engineers continuously work to supply "Plug and Play" replacement parts for obsoleted components, improve system productivity, efficiency, and extend the usable lifecycle of this equipment. CPS invites its customers to offer recommendations for equipment enhancements and will work with them to analyze feasibility.
- Ceramic Hub Assembly
- Enhanced Viewport Window
- Enhanced Pressure Meter
- Enhanced Spindle Lift Motion Control
- Ferrofluidic Spindle
- Flat Panel Display
- Load Lock Door Shaft
- Pendulum Valve
- RF Enclosure Assembly
- Dual Endpoint for Nitride Processing
- AC and RF Feedthru’s
- RF Strap
- Sapphire Window
- LF Generator Monitoring
- Showerhead Gapping Kit
- 100mm Nested Cassette
- Wafer on Paddle Sensor
- Digital Water Flow Switch
- Hoist Lock Assembly
- C1D Specialty Tool Kit
- 5 Volt Monitoring and Power Board
- TEOS Heater Enhancement
- C1D Back Fill Filter
- PEP Platform Controllers
- L3510 Lamp Failure Detection
- L3510/A3010 LCD Upgrade
- Unified Plasma Tube
- Yaskawa Refurbishment
- Alicat Regulator Kit (MV200)
- Rotation Sensor Kit
- Maintenance Reduction Kit (Non Contact Edge Gap)
- Labyrinth Wafer Head Seal
- Carrier Pneumatics Quick Disconnect (MV200)
- Genmark Robot (MV200)
- Advanced Process Control Package (776/MV200)
- AEON Controller Upgrade (372/472)
- Non-Contact Wafer Head Seal (676/776/MV200)
- No Buff Kit